Wafer-scale controlled growth of MoSby magnetron sputtering: from in-plane to inter-connected vertically-aligned flakes.

Recently, Molybdenum disulfide (MoS) has attracted great attention due to its unique characteristics and potential applications in various fields. The advancements in the field have substantially improved at the laboratory scale however, a synthesis approach that produces large area growth of MoSon a wafer scale is the key requirement for the realization of commercial two-dimensional (2D) technology. Herein, we report tunable MoSgrowth with varied morphologies via radio frequency magnetron sputtering by controlling growth parameters.