We compare the reflectance and stability of multilayers comprising either Si/Mo, Si/Mo2C, Si/B4C, Si/C, or Si/SiC bilayers, designed for use as extreme-ultraviolet (EUV) reflective coatings. The films were deposited by using magnetron sputtering and characterized by both x-ray and EUV reflectometry. We find that the new Si/SiC multilayer offers the greatest spectral selectivity at the longer wavelengths, as well as the greatest thermal stability.
View Article and Find Full Text PDFThe normal-incidence efficiencies of two laminar gratings and the reflectances of two parabolic mirrors with matching multilayer coatings were measured by monochromatic synchrotron radiation and were compared with modeling calculations. These optics were developed for the Extreme-Ultraviolet Imaging Spectrometer to be launched on the Japanese Solar-B mission. Each optic has two sectors coated with Mo/Si multilayers that reflect the 17-21-nm and 25-29-nm wave bands at normal incidence.
View Article and Find Full Text PDFWe have developed a new depth-graded multilayer system comprising W and SiC layers, suitable for use as hard x-ray reflective coatings operating in the energy range 100-200 keV. Grazing-incidence x-ray reflectance at E = 8 keV was used to characterize the interface widths, as well as the temporal and thermal stability in both periodic and depth-graded W/SiC structures, whereas synchrotron radiation was used to measure the hard x-ray reflectance of a depth-graded multilayer designed specifically for use in the range E approximately 150-170 keV. We have modeled the hard x-ray reflectance using newly derived optical constants, which we determined from reflectance versus incidence angle measurements also made using synchrotron radiation, in the range E = 120-180 keV.
View Article and Find Full Text PDF