Love-Mode MEMS Devices for Sensing Applications in Liquids.

Love-wave-based MEMS devices are theoretically investigated in their potential role as a promising technological platform for the development of acoustic-wave-based sensors for liquid environments. Both single- and bi-layered structures have been investigated and the velocity dispersion curves were calculated for different layer thicknesses, crystallographic orientations, material types and electrical boundary conditions. High velocity materials have been investigated too, enabling device miniaturization, power consumption reduction and integration with the conditioning electronic circuits.