Molecular Dynamics Study of Poly(dimethylsiloxane) Nanostructure Distortion in a Soft Lithography Demolding Process.

This study aims at investigating the distortion of poly(dimethylsiloxane) (PDMS) nanostructures in a soft lithography demolding process using molecular dynamics simulation. Experimental results show that after peeling, PDMS nanopillars became 10-60% longer in height than the mold size. Molecular dynamics simulations have been employed to plot the stress-strain curve of the nanopillars when subjected to uniaxial stress.