Redeposition-Free Deep Etching in Small KY(WO) Samples.

KY(WO) is a promising material for on-chip laser sources. Deep etching of small KY(WO) samples in combination with various thin film deposition techniques is desirable for the manufacturing of such devices. There are, however, several difficulties that need to be overcome before deep etching of KY(WO) can be realized in small samples in a reproducible manner.