Influence of PZT Coating Thickness and Electrical Pole Alignment on Microresonator Properties.

With increasing technical requirements in the design of microresonators, the development of new techniques for lightweight, simple, and inexpensive components becomes relevant. Lead zirconate titanate (PZT) is a powerful tool in the formation of these components, allowing a self-actuation or self-sensing capability. Different fabrication methods lead to the variation of the properties of the device itself.

Periodical Microstructures Based on Novel Piezoelectric Material for Biomedical Applications.

A novel cantilever type piezoelectric sensing element was developed. Cost-effective and simple fabrication design allows the use of this element for various applications in the areas of biomedicine, pharmacy, environmental analysis and biosensing. This paper proposes a novel piezoelectric composite material whose basic element is PZT and a sensing platform where this material was integrated.

Novel piezoelectric effect and surface plasmon resonance-based elements for MEMS applications.

This paper covers research on novel thin films with periodical microstructure--optical elements, exhibiting a combination of piezoelectric and surface plasmon resonance effects. The research results showed that incorporation of Ag nanoparticles in novel piezoelectric--plasmonic elements shift a dominating peak in the visible light spectrum. This optical window is essential in the design of optical elements for sensing systems.