Two-spherical-wave ultraviolet interferometer for making an antireflective subwavelength periodic pattern on a curved surface.

An ultraviolet two-spherical-wave interferometer was developed in order to make a subwavelength structured surface on a curved surface. The change in fringe period on the curved surface was significantly suppressed compared with the two-plane-wave interferometer. The optical setup method for suppressing the change in fringe period is described.