Controllable fabrication of patterned ZnO nanorod arrays: investigations into the impacts on their morphology.

Fabricating ZnO nanorod arrays with precisely controlled morphology, alignment, and density is highly desirable but rather challenging. On the other hand, understanding the parameters that affect their final morphology and the growth mechanisms is significant to integrate such patterned ZnO nanorod arrays in various applications. Therefore, ZnO nanorod arrays with different density and morphology were fabricated by electron beam lithography (EBL) combined with the hydrothermal methods in this work.