Controlled morphology of aluminum alloy nanopillar films: from nanohorns to nanoplates.

Nanopillar films of Al-Nb alloys have been fabricated on substrates with a regular concave cell structure by oblique angle physical vapor deposition. The concave cell structure of the substrate increases the shadow region for the flux of depositing atoms, assisting the formation of an isolated nanopillar on each cell. Depending upon the alloy composition and deposition angle, the pillar shape changes from horn-like nanopillars through triangular nanoprisms to nanoplates.