High electromechanical strain and enhanced temperature characteristics in lead-free (Na,Bi)TiO-BaTiO thin films on Si substrates.

Here, we demonstrate the high electromechanical strain and enhanced temperature characteristics in the c-axis-oriented lead-free (Na,Bi)TiO-BaTiO (NBT-BT) polycrystalline thin film prepared on Si substrates by rf magnetron sputtering. The effective transverse piezoelectric coefficient, e, estimated from the electromechanical strain measured under high electric field, reaches a high level of -12.5 C/m, and is comparable to those of conventional Pb(Zr,Ti)O films.