Crossflow electro-microfiltration of oxide-CMP wastewater.

In this work, an electrically enhanced crossflow microfiltration (EECMF) system was used for the treatment of oxide-CMP wastewater under different operating conditions to investigate their effects on filtration rate. Oxide-CMP wastewater was obtained from a wafer fab and characterized by various standard methods. A membrane with a cut size of 0.