An optomechanical MEMS geophone with a 2.5 ng/Hz noise floor for oil/gas exploration.

High-precision geophones play crucial roles in terrestrial applications such as oil and gas exploration as well as seismic monitoring. The development of optomechanical precision measurements provides a new design method for geophones, offering higher sensitivity and smaller dimensions compared to traditional geophones. In this work, we introduce an optomechanical microelectromechanical system (MEMS) geophone based on a plano-concave Fabry‒Perot (F-P) microcavity, which has a high sensitivity of 146 V/g.