Optimization of polishing fluid composition for single crystal silicon carbide by ultrasonic assisted chemical-mechanical polishing.

Silicon carbide (SiC) is renowned for its exceptional hardness, thermal conductivity, chemical stability, and wear resistance. However, the existing process is difficult to meet the high standards of uniform corrosion in its polishing process and surface roughness and flatness after polishing, new polishing fluids and technique optimization are crucial for development. The study optimized and validated the composition of the polishing fluid used in ultrasonic-assisted chemical-mechanical polishing (UACMP).

Study on the mechanism of ultrasonic cavitation effect on the surface properties enhancement of TC17 titanium alloy.

In industrial production and scientific research, ultrasonic cavitation technology, with its outstanding physical and chemical processing capabilities, has been widely applied in fields such as material surface modification, chemical synthesis, and biotechnology, becoming a focal point of research and application. This article delves into the effects of different ultrasonic frequencies on cavitation outcomes through the combined use of numerical simulation, fluorescence analysis, and high-speed photography, specifically analyzing the quantitative improvement in the mechanical properties of TC17 titanium alloy under ultrasonic cavitation at frequencies of 20 kHz, 30 kHz, and 40 kHz. The study found that at an ultrasonic frequency of 20 kHz, the maximum expansion radius of cavitation bubbles can reach 51.