Multilayered skyscraper microchips fabricated by hybrid "all-in-one" femtosecond laser processing.

Multilayered microfluidic channels integrated with functional microcomponents are the general trend of future biochips, which is similar to the history of Si-integrated circuits from the planer to the three-dimensional (3D) configuration, since they offer miniaturization while increasing the integration degree and diversifying the applications in the reaction, catalysis, and cell cultures. In this paper, an optimized hybrid processing technology is proposed to create true multilayered microchips, by which all-in-one" 3D microchips can be fabricated with a successive procedure of 3D glass micromachining by femtosecond-laser-assisted wet etching (FLAE) and the integration of microcomponents into the fabricated microchannels by two-photon polymerization (TPP). To create the multilayered microchannels at different depths in glass substrates (the top layer was embedded at 200 μm below the surface, and the underlying layers were constructed with a 200-μm spacing) with high uniformity and quality, the laser power density (13~16.

Femtosecond Mathieu Beams for Rapid Controllable Fabrication of Complex Microcages and Application in Trapping Microobjects.

Structured laser beam based microfabrication technology provides a rapid and flexible way to create some special microstructures. As an important member in the propagation of invariant structured optical fields, Mathieu beams (MBs) exhibit regular intensity distribution and diverse controllable parameters, which makes it extremely suitable for flexible fabrication of functional microstructures. In this study, MBs are generated by a phase-only spatial light modulator (SLM) and used for femtosecond laser two-photon polymerization (TPP) fabrication.

Localized Self-Growth of Reconfigurable Architectures Induced by a Femtosecond Laser on a Shape-Memory Polymer.

Architectures of natural organisms especially plants largely determine their response to varying external conditions. Nature-inspired shape transformation of artificial materials has motivated academic research for decades due to wide applications in smart textiles, actuators, soft robotics, and drug delivery. A "self-growth" method of controlling femtosecond laser scanning on the surface of a prestretched shape-memory polymer to realize microscale localized reconfigurable architectures transformation is introduced.

Optimized holographic femtosecond laser patterning method towards rapid integration of high-quality functional devices in microchannels.

Rapid integration of high-quality functional devices in microchannels is in highly demand for miniature lab-on-a-chip applications. This paper demonstrates the embellishment of existing microfluidic devices with integrated micropatterns via femtosecond laser MRAF-based holographic patterning (MHP) microfabrication, which proves two-photon polymerization (TPP) based on spatial light modulator (SLM) to be a rapid and powerful technology for chip functionalization. Optimized mixed region amplitude freedom (MRAF) algorithm has been used to generate high-quality shaped focus field.