Quantitative depth profile analysis of micrometer-thick multilayered thin coatings using step-scan FT-IR photoacoustic spectroscopy.

This paper demonstrates the results of the comparison of step-scan FT-IR photoacoustic spectroscopy with other established spectroscopic and microscopic techniques in the quantitative depth profile determination of micrometer- and submicrometer-thick multilayered thin coatings. The power of the phase rotation and phase spectrum analytical methods to clearly distinguish the infrared signature of submicrometer-thick coatings is demonstrated. The thickness determined by the step-scan FT-IR photoacoustic method is in very reasonable agreement with optical microtomy/microscopy measurements performed at-line during the coating process.