Wavefront reconstruction by spatial-phase-shift imaging interferometry.

Common-path imaging interferometers offer some advantages over other interferometers, such as insensitivity to vibrations and the ability to be attached to any optical system to analyze an imaged wavefront. We introduce the spatial-phase-shift imaging interferometry technique for surface measurements and wavefront analysis in which different parts of the wavefront undergo certain manipulations in a certain plane along the optical axis. These manipulations replace the reference-beam phase shifting of existing interferometry methods.

Spatial phase-shift interferometry--a wavefront analysis technique for three-dimensional topometry.

We describe a new wavefront analysis method, in which certain wavefront manipulations are applied to a spatially defined area in a certain plane along the optical axis. These manipulations replace the reference-beam phase shifting of existing methods, making this method a spatial phase-shift interferometry method. We demonstrate the system's dependence on a defined spatial Airy number, which is the ratio of the characteristic dimension of the manipulated area and the Airy disk diameter of the optical system.

Generalized method for wave-front analysis.

We suggest and demonstrate a new method for wave-front analysis based on common-path phase-shift interferometry. We introduce a formalism and an iterative mathematical algorithm in which the wave front is transformed, modified, and inversely transformed. The resulting intensity data are sufficient to reconstruct the entire wave front.