Low Power Compact 3D-Constructed AlScN Piezoelectric MEMS Mirrors for Various Scanning Strategies.

In this paper, the newly developed 3D-constructed AlScN piezoelectric MEMS mirror is presented. This paper describes the structure and driving mechanism of the proposed mirror device, covering its driving characteristics in both quasi-static and resonant scan modes. Particularly, this paper deals with various achievable scan patterns including 1D line scan and 2D area scan capabilities and driving methods to realize each scanning strategy.

High speed external cavity diode laser concept based on a resonantly driven MEMS scanner for the mid-infrared region.

The rapid detection of trace gases is of great relevance for various spectroscopy applications. In this regard, the technology of external cavity diode lasers (ECDLs) has firmly established itself due to its excellent properties. Outside of the laboratory environment, however, these still have some restrictions, especially with regard to high acquisition rates for sensitive spectroscopy applications and mode-hop-free tuning.

PZT-Actuated and -Sensed Resonant Micromirrors with Large Scan Angles Applying Mechanical Leverage Amplification for Biaxial Scanning.

This article presents design, fabrication and characterization of lead zirconate titanate (PZT)-actuated micromirrors, which enable extremely large scan angle of up to 106° and high frequency of 45 kHz simultaneously. Besides the high driving torque delivered by PZT actuators, mechanical leverage amplification has been applied for the micromirrors in this work to reach large displacements consuming low power. Additionally, fracture strength and failure behavior of poly-Si, which is the basic material of the micromirrors, have been studied to optimize the designs and prevent the device from breaking due to high mechanical stress.