The ability to fabricate 4-level diffractive structures with 1 µm critical dimensions has been demonstrated for the creation of fast (∼f/3.1 at 633 nm) Fresnel zone lenses (FZLs) with >60% diffraction efficiency into the -1 focusing order and nearly complete suppression of 0 and +1 orders. This is done using tooling capable of producing optics with 800 mm apertures.
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