Numerical Study of a Capacitive Graphene Oxide Humidity Sensor with Etched Configuration.

The geometrical dependence of humidity sensors on sensing performance has not been quantitatively outlined. Furthermore, the etching effect on humidity sensors is still elusive due to the difficulty in separating the effects of the geometrical change and etching-induced porosity on the overall performance. Here, we use COMSOL Multiphysics to perform a numerical study of a capacitive graphene oxide (GO) humidity sensor, with emphasis on the dimensions and etching effect on their sensing performance.