Dynamic ultraviolet harmonic beam pattern control by programmable spatial wavefront modulation of near-infrared fundamental beam.

The ultraviolet (UV) wavelength regime is attracting increasing attention because of its growing demand in semiconductor lithography, spectroscopy, and imaging applications owing to its high spatial resolution and high photon energy. However, beam shape control, beam delivery, and wavefront manipulation of UV laser beams usually require highly dedicated optics because of the strong UV absorption of most optical materials and the high surface precision required for tailoring short wavelengths, thus limiting a broader application of UV wavelengths. Here, we demonstrate a novel dynamic UV harmonic beam pattern control by manipulating the near-infrared (NIR) wavefront of the fundamental wavelength of a femtosecond pulse laser.