The performance of mid-infrared (MIR) on-chip gas sensors, operating via laser absorption spectroscopy, hinges critically on light-matter interaction dynamics, significantly influenced by external confinement and the effective light path length. Conventional on-chip sensors, however, face challenges in achieving the required limit of detection for highly sensitive applications, primarily due to their intrinsically short effective light path. Furthermore, these sensors are limited in their spectral range coverage within the MIR spectrum by the constraints of standard silicon-based platforms.
View Article and Find Full Text PDFIn this paper, we systematically investigated tailoring bolometric properties of a proposed heat-sensitive TiO/Ti/TiO tri-layer film for a waveguide-based bolometer, which can play a significant role as an on-chip detector operating in the mid-infrared wavelength range for the integrated optical gas sensors on Ge-on-insulator (Ge-OI) platform. As a proof-of-concept, bolometric test devices with a TiO single-layer and TiO/Ti/TiO tri-layer films were fabricated by varying the layer thickness and thermal treatment condition. Comprehensive characterization was examined by the scanning transmission electron microscopy (STEM), X-ray diffraction (XRD), and X-ray photoelectron spectroscopy (XPS) analyses in the prepared films to fully understand the microstructure and interfacial properties and the effects of thermal treatment.
View Article and Find Full Text PDFIn this paper, InAsSb-based hetero-junction photovoltaic detector (HJPD) with an InAlSb barrier layer was grown on GaAs substrates. By using technology computer aided design (TCAD), a design of a barrier layer that can achieve nearly zero valance band offsets was accomplished. A high quality InAsSb epitaxial layer was obtained with relatively low threading dislocation density (TDD), calculated from a high-resolution X-ray diffraction (XRD) measurement.
View Article and Find Full Text PDFWe report the fabrication of quantum dot infrared photodetectors (QDIPs) on silicon (Si) substrates by means of metal wafer bonding and an epitaxial lift-off process. According to the photoluminescence (PL) and x-ray diffraction measurements, the QDIP layer was transferred onto the Si substrate without degradation of the crystal quality or residual strain. In addition, from the PL results, we found that an optical cavity was formed because Pt/Au of the bonding material was served as the back mirror and the facet of the GaAs/air was served as the front mirror.
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