Low temperature NO gas sensing with ZnO nanostructured by laser interference lithography.

ZnO conductometric gas sensors have been widely studied due to their good sensitivity, cost-efficiency, long stability and simple fabrication. This work is focused on NO sensing, which is a toxic and irritating gas. The developed sensor consists of interdigitated electrodes covered by a ZnO sensing layer.

Study of deposition parameters and growth kinetics of ZnO deposited by aerosol assisted chemical vapor deposition.

Aerosol-assisted Chemical Vapor Deposition (AACVD) is a thermally activated CVD technique that uses micro-droplets as deposition precursors. An AACVD system with a custom-designed reaction chamber has been implemented to grow ZnO thin films using zinc chloride as a precursor. The present work aims to study the impact of the deposition parameters on the thin film, as well as the microstructure evolution and growth kinetics.