Formation of Nanocomposites by Oxidizing Annealing of SiO x and SiO x Films: Ellipsometry and FTIR Analysis.

The structural-phase transformations induced by air annealing of SiO x and SiO x  < Er,F > films were studied by the combined use of infrared spectroscopy and ellipsometry. The films were prepared using vacuum evaporation of SiO powder and co-evaporation of SiO and ErF3 powders. The annealing took place at moderate temperatures (750 and 1000 °C).