Publications by authors named "Sergey Belykh"
Sputtering of silicon nanopowders by an argon cluster ion beam.
Beilstein J Nanotechnol
January 2019
Article Synopsis
- The study used an Ar cluster ion beam to irradiate Si nanopowder targets, focusing on parameters like energy and dose.
- Results showed that sputtering yield decreased with higher doses and target densities, with an unusual peak at 17.3 keV where yield was significantly greater than bulk Si.
- The findings were attributed to a combination of finite size effects and debris formation impacting the sputtering process.