Effects of Rapid Thermal Treatment on Characteristics of Magnetron-Sputtered NiO Thin Films for Supercapacitor Applications.

Supercapacitors are promising energy storage devices due to their high power density, long cycling life, and short charging time. NiO is one of the alternative inorganic materials that could be used to replace the conventional RuO2 electrodes in these supercapacitors. In the present study, NiO thin film was prepared by radio frequency magnetron sputtering using a NiO alloy target.