We have prepared SrTiO3/BaTiO3 multilayer film on alumina substrates by a sol-gel technique and investigated their response for sensing ethanol vapor. The surface morphology of the films were characterized by atomic force microscope (AFM) showing that the grain size of the films increase up to 40 nm as the annealing temperature increased to 1000 degrees C. The ethanol sensors based on SrTiO3/BaTiO3 thin films were fabricated by applying interdigitated gold electrodes by sputtering technique.
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