A Novel Web-Based Approach for Monitoring Biodiversity.

Understanding complexities in biodiversity is one of the fundamental goals of ecology and its monitoring is significant for ecosystem sustainability, maintenance, and conservation. However, biodiversity monitoring needs improvement to handle complex datasets and their analyses. This study attempts to understand these ecological complexities quickly, efficiently, and easily.

Determination of the full scattering matrix using coherent Fourier scatterometry.

We demonstrate a method to obtain within an arbitrary numerical aperture (NA) the entire scattering matrix of a scatterer by using focused beam coherent Fourier scatterometry. The far-field intensities of all scattered angles within the NA of the optical system are obtained in one shot. The corresponding phases of the field are obtained by an interferometric configuration.

Reconstruction of sub-wavelength features and nano-positioning of gratings using coherent Fourier scatterometry.

Optical scatterometry is the state of art optical inspection technique for quality control in lithographic process. As such, any boost in its performance carries very relevant potential in semiconductor industry. Recently we have shown that coherent Fourier scatterometry (CFS) can lead to a notably improved sensitivity in the reconstruction of the geometry of printed gratings.