Thin films of the superconductor YBaCuO (YBCO) were modified by low-energy light-ion irradiation employing collimated or focused He beams, and the long-term stability of irradiation-induced defects was investigated. For films irradiated with collimated beams, the resistance was measured in situ during and after irradiation and analyzed using a phenomenological model. The formation and stability of irradiation-induced defects are highly influenced by temperature.
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