Etchless chalcogenide microresonators monolithically coupled to silicon photonic waveguides.

Integration of chalcogenide waveguides in silicon photonics can mitigate the prohibitive nonlinear losses of silicon while leveraging the mature complementary metal-oxide-semiconductor (CMOS)-compatible nanophotonic fabrication process. In this work, we demonstrate, for the first time, to the best of our knowledge, a method of integrating high- chalcogenides microring resonators onto the silicon photonics platform without post-process etching. The method uses micro-trench filling and a novel thermal dewetting technique to form low-loss chalcogenide strip waveguides.