Publications by authors named "Sami S Alabsi"
Article Synopsis
- Piezoelectric microelectromechanical systems (piezo-MEMS) are effective for sensitive gas detection and include various types like microcantilevers and surface acoustic waves.
- The characteristics of piezo-MEMS gas sensors include their small size, ability to integrate with circuits, and fabrication flexibility, making them suitable for detecting low-level gas concentrations.
- The study explores different gas sensor types based on piezoelectricity, focusing on principles of operation, materials used, and design parameters for optimal performance.
This work describes the fabrication and characterization of a Micro-Electro-Mechanical System (MEMS) sensor for gas sensing applications. The sensor is based on standard PolyMUMPs (Polysilicon Multi-Users MEMS Process) technology to control the temperature over the sensing layer. Due to its compact size and low power consumption, micro-structures enable a well-designed gas-sensing-layer interaction, resulting in higher sensitivity compared to the ordinary materials.
View Article and Find Full Text PDFOver the last couple of decades, the advancement in Microelectromechanical System (MEMS) devices is highly demanded for integrating the economically miniaturized sensors with fabricating technology. A sensor is a system that detects and responds to multiple physical inputs and converting them into analogue or digital forms. The sensor transforms these variations into a form which can be utilized as a marker to monitor the device variable.
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