ZrN-Based Multilayers Prepared by Reactive Sputtering as Coatings for Electrode Plates of Proton Exchange Membrane Water Electrolyzers.

ZrN and TiN thin coatings have been investigated for use on stainless steel for bipolar plates of proton exchange membrane water electrolyzers. Films were deposited by reactive magnetron sputtering using Ar and N from metallic Zr and Ti targets on different substrates to perform a deep characterization of their relevant properties. The effect of the deposition parameters, such as N/Ar ratio, working pressure, or supplied power, has been explored.