Integration of fully microfabricated, three-dimensionally sharp electrospray ionization tips with microfluidic glass chips.

This paper presents parallel microfabrication of three-dimensionally sharp electrospray ionization emitters made out of glass. For the first time, the fabrication of glass emitters relies only on standard microfabrication techniques (i.e.

Reversible switching between superhydrophobic states on a hierarchically structured surface.

Nature offers exciting examples for functional wetting properties based on superhydrophobicity, such as the self-cleaning surfaces on plant leaves and trapped air on immersed insect surfaces allowing underwater breathing. They inspire biomimetic approaches in science and technology. Superhydrophobicity relies on the Cassie wetting state where air is trapped within the surface topography.

Stroboscopic supercontinuum white-light interferometer for MEMS characterization.

We used a supercontinuum-based scanning white-light interferometer to characterize the oscillation of a MEMS device. The output of a commercially available supercontinuum light source (FiberWare Ilum II USB) was modulated to achieve stroboscopic operation. By synchronizing the modulation frequency of the source to the sample oscillation, dynamic 3-D profile measurements were recorded.

A microfabricated micropillar liquid chromatographic chip monolithically integrated with an electrospray ionization tip.

We present the first monolithically integrated silicon/glass liquid chromatography-electrospray ionization microchip for mass spectrometry. The microchip is fabricated by bonding a silicon wafer, which has deep reactive ion etched micropillar-filled channels, together with a glass lid. Both the silicon channel and the glass lid have a through-wafer etched sharp tip that produces a stable electrospray.

A microfabricated silicon platform with 60 microfluidic chips for rapid mass spectrometric analysis.

This work presents a way of using silicon microfabrication to take advantage of the rim of a silicon wafer in a novel manner. Our circular multichip platform, which is fabricated using only standard microfabrication techniques, has 60 identical miniaturized micropillar array electrospray ionization (μPESI) chips at the periphery of a silicon wafer. The fabricated platform is fixed on a computer controlled rotating table, in front of a mass spectrometer (MS).

Controlled lateral spreading and pinning of oil droplets based on topography and chemical patterning.

Geometric pinning sites can be used to control the lateral spreading and pinning of oils on surfaces. The geometric pinning effect combined with lithographic surface chemistry patterning allows controlling the shapes of oil droplets. We study the confinement effect on test structures of various protruding and intruding geometries, and employ scanning electron microscopy analysis to study the shape of the meniscus at the edges of the chemical patterns.

Integrated photocatalytic micropillar nanoreactor electrospray ionization chip for mimicking phase I metabolic reactions.

We developed a nanoreactor chip based system to mimic phase I metabolic reactions of small organic compounds. The microchip, made of silicon, has an anatase-phase titanium dioxide (TiO(2)) nanolayer coating for photocatalysis and an integrated electrospray ionization (ESI) tip for direct mass spectrometric (MS) analysis. This novel method for mimicking phase I metabolic reactions uses an on-chip TiO(2)-nanolayer and an external UV-lamp to induce photocatalyzed chemical reactions of drug compounds in aqueous solutions.

Fabrication of nanocluster silicon surface with electric discharge and the application in desorption/ionization on silicon-mass spectrometry.

This study presents a new, simple, and low-cost technique to fabricate a nanocluster silicon (NCSi) surface on planar silicon using a micro-scale direct current (DC) discharge under ambient conditions. The method requires no masks, chemicals, vacuum environment, or laser, but only a high-voltage supply. The NCSi surfaces, characterized by scanning electron microscopy (SEM) and energy dispersive X-ray (EDX) spectroscopy, consist of oxidized silicon nanoclusters 50-200 nm in diameter, likely formed by melting due to high temperatures in the discharge.

Optical temperature measurements of silicon microbridge emitters.

Microbridges are miniature suspended structures fabricated in silicon. Passing a current through the microbridge can heat it up to the point of incandescence. A glowing microbridge can be used as a wideband light source.

UV-embossed inorganic-organic hybrid nanopillars for bioapplications.

We demonstrate rapid and maskless wafer-scale fabrication of inorganic-organic hybrid nanopillars for microfluidic and mass spectrometric applications. The nanopillar features are transferred from a black silicon master to the hybrid material by UV-embossing with a composite stamp made of polydimethylsiloxane (PDMS)/hard-PDMS (h-PDMS), which allows accurate transfer of structures in the 100 nm size range. The nanopillar embossing process is extremely simple and well suited for cheap wafer-scale prototyping, as the process does not require expensive masks or stamps and even works with a standard office lamp as the exposure source.

Surface assisted laser desorption/ionization on two-layered amorphous silicon coated hybrid nanostructures.

Matrix-free laser desorption/ionization was studied on two-layered sample plates consisting of a substrate and a thin film coating. The effect of the substrate material was studied by depositing thin films of amorphous silicon on top of silicon, silica, polymeric photoresist SU-8, and an inorganic-organic hybrid. Des-arg(9)-bradykinin signal intensity was used to evaluate the sample plates.

Suspended nanostructured alumina membranes.

Suspended thin membranes have drawn increased attention due to their exceptional thermal properties. The membranes presented here are made of alumina (Al(2)O(3)), which offers several advantages over the traditional silicon nitride membranes. Alumina films are atomic layer deposited (ALD), which enables conformal deposition profiles at low deposition temperatures.

Silicon micropillar array electrospray chip for drug and biomolecule analysis.

We have developed a lidless micropillar array electrospray ionization chip (microPESI) combined with mass spectrometry (MS) for analysis of drugs and biomolecules. The microPESI chip, made of silicon, contains a sample introduction spot for a liquid sample, an array of micropillars (diameter, height, and distance between pillars in the range of 15-200, 20-40, and 2-80 microm, respectively), and a sharpened tip for direct electrospray formation. The microchips were fabricated using deep reactive ion etching (DRIE) which results in accurate dimensional control.