Separation and Analysis of Connected, Micrometer-Sized, High-Frequency Damage on Glass Plates due to Laser-Accelerated Material Fragments in Vacuum.

In this paper, we present a new processing method, called MOSES-Impacts, for the detection of micrometer-sized damage on glass plate surfaces. It extends existing methods by a separation of damaged areas, called impacts, to support state-of-the-art recycling systems in optimizing their parameters. These recycling systems are used to repair process-related damages on glass plate surfaces, caused by accelerated material fragments, which arise during a laser-matter interaction in a vacuum.