Neutral helium atom microscopy.

Neutral helium atom microscopy, also referred to as scanning helium microscopy and commonly abbreviated SHeM or NAM (neutral atom microscopy), is a novel imaging technique that uses a beam of neutral helium atoms as an imaging probe. The technique offers a number of advantages such as the very low energy of the incident probing atoms (less than 0.1 eV), unsurpassed surface sensitivity (no penetration into the sample bulk), a charge neutral, inert probe and a high depth of field.