3D micro/nanoshaping of metal strip arrays by direct imprinting for chiral metasurfaces.

An original hybrid method for three-dimensional (3D) shaping of micro- and nanostructures by direct imprinting of lithographically patterned metal 2D-elements on a polymer substrate is proposed. The technological features of the method are demonstrated by transforming Au micro/nanostrip arrays into 3D half-turn helices. The metasurface formed by an array of 3D half-turn Au microhelices in the surface layer of a polymer substrate rotates the polarization plane of transmitted 3 THz radiation through an angle in excess of 50°.

Terahertz metamaterials and systems based on rolled-up 3D elements: designs, technological approaches, and properties.

Electromagnetic metamaterials opened the way to extraordinary manipulation of radiation. Terahertz (THz) and optical metamaterials are usually fabricated by traditional planar-patterning approaches, while the majority of practical applications require metamaterials with 3D resonators. Making arrays of precise 3D micro- and nanoresonators is still a challenging problem.