A technological approach for direct glass structuring is presented by exploiting electron-beam-induced defect generation utilizing a conventional scanning electron microscope (SEM). The structuring process is assumed to be linked to electron-beam-induced ion migration and allows to create structures of several hundred nanometers in depth. It is demonstrated that the structuring can be realized in literally any SEM, which thus enables a comparatively simple implementation in support of a broad field of applications.
View Article and Find Full Text PDF3D printing down to the nanoscale remains a significant challenge. In this paper, the study explores the use of scanning probes that emit low-energy electrons (<100 eV) coupled with the localized injection and electron-induced decomposition of precursor molecules, for the precise localized deposition of 3D nanostructures. The experiments are performed inside the chamber of a scanning electron microscope (SEM), enabling the use of the in-built gas injector system (GIS) with gaseous naphthalene precursor for carbon deposition, as well as immediate inspection of the deposits by SEM.
View Article and Find Full Text PDFMicromachines (Basel)
January 2024
Electrohydrodynamic wetting manipulation plays a major role in modern microfluidic technologies such as lab-on-a-chip applications and digital microfluidics. Liquid dielectrophoresis (LDEP) is a common driving mechanism, which induces hydrodynamic motion in liquids by the application of nonhomogeneous electrical fields. Among strategies to analyze droplet movement, systematic research on the influence of different frequencies under AC voltage is missing.
View Article and Find Full Text PDFAn unconventional approach for the resistless nanopatterning 2H- and 1T'-MoTe by means of scanning probe lithography is presented. A Fowler-Nordheim tunneling current of low energetic electrons (E = 30-60 eV) emitted from the tip of an atomic force microscopy (AFM) cantilever is utilized to induce a nanoscale oxidation on a MoTe nanosheet surface under ambient conditions. Due to the water solubility of the generated oxide, a direct pattern transfer into the MoTe surface can be achieved by a simple immersion of the sample in deionized water.
View Article and Find Full Text PDFIn this paper, a miniaturized weighing cell that is based on a micro-electro-mechanical-system (MEMS) is discussed. The MEMS-based weighing cell is inspired by macroscopic electromagnetic force compensation (EMFC) weighing cells and one of the crucial system parameters, the stiffness, is analyzed. The system stiffness in the direction of motion is first analytically evaluated using a rigid body approach and then also numerically modeled using the finite element method for comparison purposes.
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