Development of a High-Density Microplasma Emission Source for a Micro Total Analysis System.

To achieve a highly sensitive and onsite analysis of a small amount samples, a microplasma-based micro total analysis systems (μ-TAS) device was developed. A dielectric barrier discharge (DBD) that can generate a stable plasma at atmospheric pressure was generated in a microchip and used as the plasma source. The use of DBD suppresses the temperature rise of the electrodes and enables operation for long times because of a reduction of the electrode damage due to suppression of the current via dielectric interposing between the electrodes.