Publications by authors named "Ryoichi Takayama"
Here, we demonstrate the high electromechanical strain and enhanced temperature characteristics in the c-axis-oriented lead-free (Na,Bi)TiO-BaTiO (NBT-BT) polycrystalline thin film prepared on Si substrates by rf magnetron sputtering. The effective transverse piezoelectric coefficient, e, estimated from the electromechanical strain measured under high electric field, reaches a high level of -12.5 C/m, and is comparable to those of conventional Pb(Zr,Ti)O films.
View Article and Find Full Text PDFPreparation of (001)-oriented Pb(Zr,Ti)O3 thin films and their piezoelectric applications.
IEEE Trans Ultrason Ferroelectr Freq Control
December 2007
Article Synopsis
- The study focuses on the preparation and application of (001)-oriented Pb(Zr,Ti)O(3) (PZT) thin films, which are known for their piezoelectric properties, suitable for sensors and actuators.
- These films were successfully grown on various substrates, including MgO, glass, and Si, using techniques like RF magnetron sputtering, achieving excellent properties without needing additional treatments.
- The PZT thin films exhibited high piezoelectric coefficients (-100 pm/V on MgO and -150 pm/V on Si) and were utilized in practical applications such as car navigation systems, hard disk drives, and inkjet printers.