β-FeSi is of interest for Si-based optoelectronic applications in the past decades. We fabricated β-FeSi thin films on the SrTiO single crystal by KrF-pulsed laser deposition to open a new view of integrating β-FeSi with non-silicon functional materials. After investigating the lateral photovoltaic effect of β-FeSi/SrTiO under the illumination of the 808 nm and 1064 nm steady lasers, we found that the position detection sensitivity can reach 2.
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