Publications by Run-Feng Zhu

Publications by authors named "Run-Feng Zhu"

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Compact GaO Thin Films Deposited by Plasma Enhanced Atomic Layer Deposition at Low Temperature.

Yue Yang Xiao-Ying Zhang Chen Wang Fang-Bin Ren Run-Feng Zhu Wen-Zhang Zhu

Nanomaterials (Basel)

April 2022

Amorphous Gallium oxide (GaO) thin films were grown by plasma-enhanced atomic layer deposition using O plasma as reactant and trimethylgallium as a gallium source. The growth rate of the GaO films was about 0.6 Å/cycle and was acquired at a temperature ranging from 80 to 250 °C.

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