A miniaturized MEMS accelerometer with anti-spring mechanism for enhancing sensitivity.

Anti-spring mechanisms are widely used for improving the noise performance of MEMS accelerometers due to their stiffness softening effect. However, the existing mechanisms typically require large bias force and displacement for achieving stiffness softening, leading to large device dimensions. Here, we propose a novel anti-spring mechanism composed of two pre-shaped curved beams connected in a parallel configuration, which can achieve stiffness softening without requiring large bias force and displacement.