Cantilever-Based Sensor Utilizing a Diffractive Optical Element with High Sensitivity to Relative Humidity.

High-sensitivity and simple, low-cost readout are desirable features for sensors independent of the application area. Micro-cantilever sensors use the deflection induced by the analyte presence to achieve high-sensitivity but possess complex electronic readouts. Current holographic sensors probe the analyte presence by measuring changes in their optical properties, have a simpler low-cost readout, but their sensitivity can be further improved.