Simulating the Residual Layer Thickness in Roll-to-Plate Nanoimprinting with Tensioned Webs.

Roll-to-plate nanoimprinting with flexible stamps is a fabrication method to pattern large-area substrates with micro- and nanotextures. The imprint consists of the preferred texture on top of a residual layer, of which the thickness and uniformity is critical for many applications. In this work, a numerical model is developed to predict the residual layer thickness (RLT) as a function of the imprint parameters.

The application of fractional order control for an air-based contactless actuation system.

Industry pushes towards ever faster and more accurate production of thin substrates. Contactless positioning offers advantages, especially in terms of risk of breakage and contamination. A system is considered designed for contactless positioning by floating a silicon wafer on a thin film of air.