Level set simulation of focused ion beam sputtering of a multilayer substrate.

The evolution of a multilayer sample surface during focused ion beam processing was simulated using the level set method and experimentally studied by milling a silicon dioxide layer covering a crystalline silicon substrate. The simulation took into account the redeposition of atoms simultaneously sputtered from both layers of the sample as well as the influence of backscattered ions on the milling process. Monte Carlo simulations were applied to produce tabulated data on the angular distributions of sputtered atoms and backscattered ions.

Complex Pore Structure of Mesoporous Zeolites: Unambiguous TEM Imaging Using Platinum Tracking.

The article proposes a new way for visualization of mesopores and quantitative evaluation of the pore structure in zeolite crystals. The approach is based on platinum tracking inside the zeolite material after its incorporation from a gaseous precursor using an electron beam prior to preparing a TEM specimen by the focused ion beam technique. The pores in mesoporous silica and purely microporous zeolite Y were visualized in TEM images in a demonstration of the capabilities of the approach.