Silicon-28-Tetrafluoride as an Educt of Isotope-Engineered Silicon Compounds and Bulk Materials for Quantum Systems.

This review provides a summary of the existing literature on a crucial raw material for the production of isotopically pure semiconductors, which are essential for the development of second-generation quantum systems. Silicon-28-tetrafluoride (SiF) is used as an educt for several isotope-engineered chemicals, such as silane-28 (SiH) and silicon-28-trichloride (SiHCl), which are needed in the pursuit of various quantum technologies. We are exploring the entire chain from the synthesis of SiF to quantum applications.