Angular and polarization properties of cross-holes nanostructured metallic filters.

It has been shown in literature that cross-shaped holes arrays can be made insensitive to polarization at normal incidence, and can even feature good stability for off-normal incidence. In this work we look for the optimal design rules to obtain high spectral stability conditions in the visible for those structures, through a complete review of all geometrical parameters using CMOS-compatible materials. Rigorous Coupled Wave Analysis (RCWA) simulations have been used to identify the most-impacting parameters and to determine typical ranges allowing for the realization of low-color errors image sensors whatever the light incidence.