Publications by authors named "Remco J Wiegerink"

In this paper, a novel fabrication process for the realization of large, suspended microfluidic channels is presented. The method is based on Buried Channel Technology and uses a mixture of HF, HNO, and water etchant, which has high selectivity between the silicon substrate and the silicon-rich silicon nitride mask material. Metal electrodes for actuation and read-out are integrated into the fabrication process.

View Article and Find Full Text PDF

Among the different techniques for monitoring the flow rate of various fluids, thermal flow sensors stand out for their straightforward measurement technique. However, the main drawback of these types of sensors is their dependency on the thermal properties of the medium, i.e.

View Article and Find Full Text PDF

This paper presents the first nickel-plated micro-Coriolis mass-flow sensor with integrated optical readout. The sensor consists of a freely suspended tube made of electroplated nickel with a total length of 60 mm, an inner diameter of 580 µm, and a wall thickness of approximately 8 µm. The U-shaped tube is actuated by Lorentz forces.

View Article and Find Full Text PDF

This paper presents a novel gas-independent thermal flow sensor chip featuring three calorimetric flow sensors for measuring flow profile and direction within a tube, along with a single-wire flow independent thermal conductivity sensor capable of identifying the gas type through a simple DC voltage measurement. All wires have the same dimensions of 2000 μm in length, 5 μm in width, and 1.2 μm in thickness.

View Article and Find Full Text PDF

This paper presents the modeling, fabrication, and testing of a 3D-printed Coriolis mass flow sensor. The sensor contains a free-standing tube with a circular cross-section printed using the LCD 3D-printing technique. The tube has a total length of 42 mm, an inner diameter of about 900 µm, and a wall thickness of approximately 230 µm.

View Article and Find Full Text PDF

In micro-machined micro-electromechanical systems (MEMS), refilled high-aspect-ratio trench structures are used for different applications. However, these trenches often show keyholes, which have an impact on the performance of the devices. In this paper, explanations are given on keyhole formation, and a method is presented for etching positively-tapered high-aspect ratio trenches with an optimised trench entrance to prevent keyhole formation.

View Article and Find Full Text PDF

A micro-Coriolis mass flow sensor is a resonating device that measures small mass flows of fluid. A large vibration amplitude is desired as the Coriolis forces due to mass flow and, accordingly, the signal-to-noise ratio, are directly proportional to the vibration amplitude. Therefore, it is important to maximize the quality factor Q so that a large vibration amplitude can be achieved without requiring high actuation voltages and high power consumption.

View Article and Find Full Text PDF

Surface Channel Technology is known as the fabrication platform to make free-hanging microchannels for various microfluidic sensors and actuators. In this technology, thin film metal electrodes, such as platinum or gold, are often used for electrical sensing and actuation purposes. As a result that they are located at the top surface of the microfluidic channels, only topside sensing and actuation is possible.

View Article and Find Full Text PDF

Interface circuits for capacitive MEMS accelerometers are conventionally based on charge-based approaches. A promising alternative to these is provided by frequency-based readout techniques that have some unique advantages as well as a few challenges associated with them. This paper addresses these techniques and presents a derivation of the fundamental resolution limits that are imposed on them by phase noise.

View Article and Find Full Text PDF

A PHP Error was encountered

Severity: Notice

Message: fwrite(): Write of 34 bytes failed with errno=28 No space left on device

Filename: drivers/Session_files_driver.php

Line Number: 272

Backtrace:

A PHP Error was encountered

Severity: Warning

Message: session_write_close(): Failed to write session data using user defined save handler. (session.save_path: /var/lib/php/sessions)

Filename: Unknown

Line Number: 0

Backtrace: