Flow-Independent Thermal Conductivity and Volumetric Heat Capacity Measurement of Pure Gases and Binary Gas Mixtures Using a Single Heated Wire.

Among the different techniques for monitoring the flow rate of various fluids, thermal flow sensors stand out for their straightforward measurement technique. However, the main drawback of these types of sensors is their dependency on the thermal properties of the medium, i.e.

Compact Micro-Coriolis Mass-Flow Meter with Optical Readout.

This paper presents the first nickel-plated micro-Coriolis mass-flow sensor with integrated optical readout. The sensor consists of a freely suspended tube made of electroplated nickel with a total length of 60 mm, an inner diameter of 580 µm, and a wall thickness of approximately 8 µm. The U-shaped tube is actuated by Lorentz forces.

Thermal Flow Meter with Integrated Thermal Conductivity Sensor.

This paper presents a novel gas-independent thermal flow sensor chip featuring three calorimetric flow sensors for measuring flow profile and direction within a tube, along with a single-wire flow independent thermal conductivity sensor capable of identifying the gas type through a simple DC voltage measurement. All wires have the same dimensions of 2000 μm in length, 5 μm in width, and 1.2 μm in thickness.

Modeling, Fabrication, and Testing of a 3D-Printed Coriolis Mass Flow Sensor.

This paper presents the modeling, fabrication, and testing of a 3D-printed Coriolis mass flow sensor. The sensor contains a free-standing tube with a circular cross-section printed using the LCD 3D-printing technique. The tube has a total length of 42 mm, an inner diameter of about 900 µm, and a wall thickness of approximately 230 µm.

Development of Soft sEMG Sensing Structures Using 3D-Printing Technologies.

3D printing of soft EMG sensing structures enables the creation of personalized sensing structures that can be potentially integrated in prosthetic, assistive and other devices. We developed and characterized flexible carbon-black doped TPU-based sEMG sensing structures. The structures are directly 3D-printed without the need for an additional post-processing step using a low-cost, consumer grade multi-material FDM printer.

Heavily-Doped Bulk Silicon Sidewall Electrodes Embedded between Free-Hanging Microfluidic Channels by Modified Surface Channel Technology.

Surface Channel Technology is known as the fabrication platform to make free-hanging microchannels for various microfluidic sensors and actuators. In this technology, thin film metal electrodes, such as platinum or gold, are often used for electrical sensing and actuation purposes. As a result that they are located at the top surface of the microfluidic channels, only topside sensing and actuation is possible.

Monitoring phase transition of aqueous biomass model substrates by high-pressure and high-temperature microfluidics.

Aqueous-Phase Reforming (APR) is a promising hydrogen production method, where biomass is catalytically reformed under high pressure and high temperature reaction conditions. To eventually study APR, in this paper, we report a high-pressure and high-temperature microfluidic platform that can withstand temperatures up to 200°C and pressures up to 30 bar. As a first step, we studied the phase transition of four typical APR biomass model solutions, consisting of 10 wt% of ethylene glycol, glycerol, xylose or xylitol in MilliQ water.

New type of microengine using internal combustion of hydrogen and oxygen.

Microsystems become part of everyday life but their application is restricted by lack of strong and fast motors (actuators) converting energy into motion. For example, widespread internal combustion engines cannot be scaled down because combustion reactions are quenched in a small space. Here we present an actuator with the dimensions 100 × 100 × 5 μm(3) that is using internal combustion of hydrogen and oxygen as part of its working cycle.

Transient nanobubbles in short-time electrolysis.

Water electrolysis in a microsystem is observed and analyzed on a short-time scale of ∼10 μs. The very unusual properties of the process are stressed. An extremely high current density is observed because the process is not limited by the diffusion of electroactive species.

3D nanofabrication of fluidic components by corner lithography.

A reproducible wafer-scale method to obtain 3D nanostructures is investigated. This method, called corner lithography, explores the conformal deposition and the subsequent timed isotropic etching of a thin film in a 3D shaped silicon template. The technique leaves a residue of the thin film in sharp concave corners which can be used as structural material or as an inversion mask in subsequent steps.