Publications by authors named "Ratish Rao Nagaraj Rao"
Article Synopsis
- Gratings made with Laser Interference Lithography (LIL) show nonuniform periods, especially as substrate sizes increase.
- A new noninvasive method using a concave vacuum chuck significantly improves period uniformity on 4-inch silicon wafers, reducing variation by 86% for a 1000 nm central grating period.
- The study includes experimental results showing the effectiveness of the concave chuck, comparisons between different LIL setups, and verification of wafer flatness through optical profilometry.
