J Electron Microsc (Tokyo)
April 2010
A method for preparing plane-view transmission electron microscope (TEM) samples is presented. With this inclined pseudo-plane-view technique, the undisturbed surface of the sample can be studied in plane view. Thus, nanostructures on the surface of a substrate can be studied with TEM in much the same way as with scanning electron microscopy (SEM), but in transmission at a much higher spatial resolution and with the opportunity of performing nanoscale diffraction.
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